The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Dec. 20, 2005
Applicants:
Jeff White, Terrell, TX (US);
Jon Holt, Plano, TX (US);
Inventors:
Jeff White, Terrell, TX (US);
Jon Holt, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a method of fabricating a semiconductive device. In one aspect, the method comprises heating a gas mixture [] comprising chlorohydrocarbon having a general formula of CHCl, wherein x=2, 3, or 4. The chlorohydrocarbon is heated in a first chamberto a first temperature that substantially disassociates the chlorohydrocarbon. The substantially disassociated chlorohydrocarbon is used to form a film on a semiconductive substrate [] that is located in a second chamber [