The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Feb. 28, 2005
Applicants:
Andreas Spitzer, Ottobrunn, DE;
Elke Erben, Dresden, DE;
Inventors:
Andreas Spitzer, Ottobrunn, DE;
Elke Erben, Dresden, DE;
Assignee:
Qimonds AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/338 (2006.01); H01L 21/8238 (2006.01); H01L 21/8244 (2006.01); H01L 21/8242 (2006.01); H01L 21/8234 (2006.01); H01L 21/336 (2006.01); H01L 21/8222 (2006.01); H01L 21/20 (2006.01); H01L 21/473 (2006.01);
U.S. Cl.
CPC ...
Abstract
A polycrystalline dielectric layer is formed wherein the dielectric layer comprises a first dielectric material containing an oxide or nitride and a second material contributing to less than 1% in weight to the dielectric layer, forming a non-conductive oxide or nitride having an enthalpy lower than the enthalpy of the first dielectric material such that a leakage current along grain boundaries of the first dielectric material is reduced.