The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2009

Filed:

Jun. 02, 2006
Applicants:

Ali Afzali-ardakani, Ossining, NY (US);

Cherie R. Kagan, Ossining, NY (US);

Laura L. Kosbar, Mohegan Lake, NY (US);

Sally A. Swanson, San Jose, CA (US);

Charan Srinivasan, State College, PA (US);

Inventors:

Ali Afzali-Ardakani, Ossining, NY (US);

Cherie R. Kagan, Ossining, NY (US);

Laura L. Kosbar, Mohegan Lake, NY (US);

Sally A. Swanson, San Jose, CA (US);

Charan Srinivasan, State College, PA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention is directed to a radiation sensitive compound comprising a surface binding group proximate to one end of the compound for attachment to a substrate, and a metal binding group proximate to an opposite end of the compound. The metal binding group is not radiation sensitive. The radiation sensitive compound also includes a body portion disposed between the surface binding group and the metal binding group, and a radiation sensitive group positioned in the body portion or adjacent to the metal binding group. The surface binding group is capable of attaching to a substrate selected from a metal, a metal oxide, or a semiconductor material.


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