The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Oct. 05, 2005
Rajeev Bajaj, Fremont, CA (US);
Natraj Narayanswami, San Jose, CA (US);
Bang C. Nguyen, Palo Alto, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Natraj Narayanswami, San Jose, CA (US);
Bang C. Nguyen, Palo Alto, CA (US);
Semiquest Inc., San Jose, CA (US);
Abstract
A pad for CMP operations includes a guide plate having a plurality of holes therein and being affixed to a compressible under-layer; and a plurality of pressure-sensing and process monitoring polishing elements each affixed to the compressible under-layer and passing through a corresponding hole in the guide plate so as to be maintained in a substantially vertical orientation with respect to the compressible under-layer but being translatable in a vertical direction with respect to the guide plate.