The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2009

Filed:

Dec. 27, 2002
Applicants:

Yuval Yassour, Kibbutz Hasolelim, IL;

Hilel Richman, Haifa, IL;

Daniel Levin, Herzliya, IL;

Inventors:

Yuval Yassour, Kibbutz Hasolelim, IL;

Hilel Richman, Haifa, IL;

Daniel Levin, Herzliya, IL;

Assignee:

Coreflow Ltd., Yoqneam llit, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16C 32/06 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A non-contact support platform for supporting without contact a stationary or traveling object by air-cushion induced forces, the platform comprising at least one of two substantially opposite support surfaces, each support surfaces comprising at least one of a plurality of basic cells each having at least one of a plurality of pressure outlets and at least one of a plurality of air-evacuation channels at least one of a plurality of outlets, and one of a plurality of air-evacuation channels, each of the pressure outlets fluidically connected through a pressure flow restrictor to a high-pressure reservoir, the pressure outlets providing pressurized air for generating pressure induced forces, maintaining an air-cushion between the object and the support surface, the pressure flow restrictor characteristically exhibiting fluidic return spring behavior; each of said at least one of a plurality of air-evacuation channels having an inlet and outlet, the inlet kept at an ambient pressure or lower, under vacuum condition, for locally discharging mass flow, thus obtaining uniform support and local nature response.


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