The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Sep. 21, 2005
Applicants:
Trung T. Doan, Los Gatos, CA (US);
Jeffrey Schmidt, San Jose, CA (US);
Douglas R. Mcallister, Pleasanton, CA (US);
Stacy Meyer, San Jose, CA (US);
Inventors:
Trung T. Doan, Los Gatos, CA (US);
Jeffrey Schmidt, San Jose, CA (US);
Douglas R. McAllister, Pleasanton, CA (US);
Stacy Meyer, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23P 11/00 (2006.01); B23P 19/00 (2006.01); B23P 21/00 (2006.01); B23Q 17/00 (2006.01); B23Q 17/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
Techniques for attaching a retaining ring to a carrier head so that the bottom surface of the retaining ring is orthogonal to a central rotational axis of the carrier head are described.