The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
Sep. 28, 2007
Melanie W. Cole, Churchville, MD (US);
William Nothwang, Baltimore, MD (US);
Melanie W. Cole, Churchville, MD (US);
William Nothwang, Baltimore, MD (US);
The United States of America as represented by the Secretary of the Army, Washington, DC (US);
Abstract
Microelectromechanical systems (MEMS) include critical devices for various highly sensitive applications. However, MEMS operation may be impaired by vibration. A modular vibration control pedestal for integration with a MEMS is provided according to embodiments of the present invention which includes a piezoelectric perovskite oxide disposed on a substrate and a shape memory alloy component component disposed on the piezoelectric perovskite oxide. In particular embodiments of a MEMS device including a modular VCP, vibration is reduced by at least 50%.