The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
Aug. 29, 2003
Applicants:
Seok Won Lee, Gyoungsangbok-Do, KR;
Sang Min Jang, Gyeonggi-Do, KR;
Sang Kyu Kim, Kyoungsangbok-Do, KR;
Inventors:
Seok Won Lee, Gyoungsangbok-Do, KR;
Sang Min Jang, Gyeonggi-Do, KR;
Sang Kyu Kim, Kyoungsangbok-Do, KR;
Assignee:
LG Display Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and a method for etching insulating film prevents generation of spots by spraying etchant on a lower surface of the substrate as well as the upper surface.