The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
Mar. 16, 2006
Naoko Yanase, Kawasaki, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Ryoichi Ohara, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Naoko Yanase, Kawasaki, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Ryoichi Ohara, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A thin-film piezoelectric resonator includes a substrate, and first and second excitation portions. The substrate includes first and second cavities. The first excitation portion is disposed over the first cavity, and includes a first electrode, a first piezoelectric material and a second electrode laminated successively. An overlapping region among the first electrode, the first piezoelectric material and the second electrode defines a contour of a periphery of the first excitation portion. A first distance is defined as a distance from an end of the first excitation portion to an opening end of the first cavity. The second excitation portion is disposed over the second cavity, and includes a third electrode, a second piezoelectric material and a fourth electrode laminated successively. A second distance is defined as a distance from an end of the second excitation portion to an opening end of the second cavity and different from the first distance.