The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
Feb. 02, 2007
Satoshi Tomimatsu, Kokubunji, JP;
Kaoru Umemura, Musashino, JP;
Yuichi Madokoro, Kokubunji, JP;
Yoshimi Kawanami, Kokubunji, JP;
Yasunori Doi, Kokubunji, JP;
Satoshi Tomimatsu, Kokubunji, JP;
Kaoru Umemura, Musashino, JP;
Yuichi Madokoro, Kokubunji, JP;
Yoshimi Kawanami, Kokubunji, JP;
Yasunori Doi, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A specimen fabrication apparatus including: a sample stage to mount or hold a sample substrate, an ion beam irradiating optical system to irradiate the sample substrate with an ion beam, a specimen holder to mount a specimen obtained from the sample substrate, a transferring means including a probe, and a deposition-gas supplying source to supply a deposition-gas for forming a deposition-film between the specimen and the probe.