The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2009

Filed:

May. 15, 2003
Applicants:

Pieter J. Van Der Zaag, Seoul, KR;

Soo Y. Yoon, Kyunggi-Do, KR;

Nigel D. Young, Redhill, GB;

Inventors:

Pieter J. Van Der Zaag, Seoul, KR;

Soo Y. Yoon, Kyunggi-Do, KR;

Nigel D. Young, Redhill, GB;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An active plate () for an active matrix display device (), the active plate () comprising a substrate (), a pixel area () and an adjacent drive circuit area (). Both areas include polycrystalline silicon material formed by a process in which a metal is used to enhance the crystallization process (MIC poly-Si), but only the MIC poly-Si in the drive circuit area () is subjected to an irradiation process using an energy beam (). TFTs are fabricated with MIC poly-Si which have leakage currents in the off state sufficiently low for them to be acceptable for use as switching elements in the pixel area of matrix display devices. As only the drive circuit area () need be irradiated to provide poly-Si having the desired mobility, the time taken by the irradiation process can be significantly reduced.


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