The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2009

Filed:

May. 25, 2007
Applicants:

Tadakazu Miyashita, Nagano, JP;

Yosuke Kanai, Nagano, JP;

Inventors:

Tadakazu Miyashita, Nagano, JP;

Yosuke Kanai, Nagano, JP;

Assignee:

Fujikoshi Machinery Corp., Nagano-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract

The workpiece centering apparatus is capable of highly reducing damage of a workpiece. The workpiece centering apparatus comprises: a guide plate being provided in a tray and covering a water inlet so as to horizontally introduce water into the tray; and at least three overflow outlets for overflowing the water from the tray, the overflow outlets being formed in a peripheral wall of the tray and arranged in the circumferential direction at regular intervals. The workpiece, which is horizontally fed on a surface of the water stored in the tray, is received and floated by surface tension of the water. Then, the workpiece is centered in the tray by water flows radially overflowing from the tray via the overflow outlets.


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