The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Jan. 06, 2004
Robert Trujillo, San Jose, CA (US);
Roger Anderson, Sunnyvale, CA (US);
David Carlson, San Jose, CA (US);
Michael Hale, San Jose, CA (US);
Robert Trujillo, San Jose, CA (US);
Roger Anderson, Sunnyvale, CA (US);
David Carlson, San Jose, CA (US);
Michael Hale, San Jose, CA (US);
Other;
Abstract
A halogen lamp assemblyfor a substrate processing chamberhas a halogen lampand a ceramic heat sink monolithThe halogen lampincludes a filamentand a pair of electrical connectorsencapsulated in an envelopehaving a pinch seal endThe ceramic heat sink monolithincludes a blockand an array of spaced apart postsprojecting outwardly from the blockThe blockincludes a cavitythat has a recessed inner surfaceshaped to mate with the pinch seal endof the lampand an opening that allows the electrical connectorsof the halogen lampto pass through.