The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Oct. 13, 2006
Shigeyoshi Umemiya, Kawasaki, JP;
Osamu Matsuura, Kawasaki, JP;
Shigeyoshi Umemiya, Kawasaki, JP;
Osamu Matsuura, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A bottom electrode () made of Ir, an initial layer (), a core layer () and a termination layer () of a PZT film, and a top electrode () made of IrO, are formed on an underlining film (). The initial layer () is formed in a low oxygen partial pressure with a thickness of 5 nm. The thickness of the core layer () is set to 120 nm. The termination layer () is set to be an excess Zr layer. In other words, as for the composition of the termination layer (), 'Zr/(Zr+Ti)' is set to be larger than 0.5, and in the termination layer () Zr is contained more excessively than the morphotropic phase boundary composition.