The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Dec. 12, 2005
Rita Vos, Tremelo, BE;
Paul Mertens, Bonheiden, BE;
Bernd Kolbesen, Bad Homburg, DE;
Albrecht Fester, Frankfurt am Main, DE;
Oliver Doll, Heusenstamm, DE;
Rita Vos, Tremelo, BE;
Paul Mertens, Bonheiden, BE;
Bernd Kolbesen, Bad Homburg, DE;
Albrecht Fester, Frankfurt am Main, DE;
Oliver Doll, Heusenstamm, DE;
Interuniversitair Microelektronica Centrum ( IMEC), Leuven, BE;
Air Products and Chemicals Inc., Allentown, PA (US);
Abstract
The present invention recites a composition comprising a first compound and a second compound. The first compound has the chemical formula ( 1a), wherein m, n and o are independently from each other equal to 2 or 3; wherein p is equal to 1 or 2; R being a chemical group with the chemical formula (1a'), wherein q is equal to 1, 2 or 3; wherein R, Rand Rare independently selected from the group consisting of hydrogen and an organic group. The second compound has the chemical formula (1c). Metal ions can be present in the solution or in an external medium being contacted with the solution. The present invention can be used for cleaning a semiconductor substrate.