The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Dec. 04, 2007
Francesco Lemmi, Sunnyvale, CA (US);
Elena V. Rogojina, Los Altos, CA (US);
Pingrong Yu, Sunnyvale, CA (US);
David Jurbergs, Austin, TX (US);
Homer Antoniadis, Mountain View, CA (US);
Maxim Kelman, Mountain View, CA (US);
Francesco Lemmi, Sunnyvale, CA (US);
Elena V. Rogojina, Los Altos, CA (US);
Pingrong Yu, Sunnyvale, CA (US);
David Jurbergs, Austin, TX (US);
Homer Antoniadis, Mountain View, CA (US);
Maxim Kelman, Mountain View, CA (US);
Innovalight, Inc., Sunnyvale, CA (US);
Abstract
A method of forming a densified nanoparticle thin film in a chamber is disclosed. The method includes positioning a substrate in the chamber; and depositing a nanoparticle ink, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 300° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes exposing the porous compact to an HF vapor for a second time period of between about 2 minutes and about 20 minutes, and heating the porous compact for a second temperature of between about 25° C. and about 60° C.; and heating the porous compact to a third temperature between about 100° C. and about 1000° C., and for a third time period of between about 5 minutes and about 10 hours; wherein the densified nanoparticle thin film is formed.