The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Mar. 21, 2005
Applicants:
Martin Kratzer, Feldkirch, AT;
Bernd Heinz, Buchs, CH;
Inventors:
Martin Kratzer, Feldkirch, AT;
Bernd Heinz, Buchs, CH;
Assignee:
Singulus Technologies AG, Kahl am Main, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for separating bonded substrates and a respective apparatus used for that method is disclosed. The method comprises positioning the bonded substrates () in an evacuable chamber () by respective means, detaching a space () from that evacuable chamber by means of a sealing arrangement () so that said space comprises a partial area of the substrates with at least one gap () between the bonded substrates (), lowering the pressure in the vacuum chamber () while maintaining the pressure in the space (), thereby causing the bonded substrates to separate.