The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Jul. 07, 2006
Applicants:
Hajime Kanazawa, Utsunomiya, JP;
Yutaka Watanabe, Shioya-gun, JP;
Jun Ito, Utsunomiya, JP;
Kazuki Fujimoto, Utsunomiya, JP;
Inventors:
Hajime Kanazawa, Utsunomiya, JP;
Yutaka Watanabe, Shioya-gun, JP;
Jun Ito, Utsunomiya, JP;
Kazuki Fujimoto, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.