The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Mar. 21, 2006
Tsutomu Nanataki, Toyoake, JP;
Iwao Ohwada, Nagoya, JP;
Yuki Bessho, Nishikasugai-Gun, JP;
Takayoshi Akao, Nagoya, JP;
Tsutomu Nanataki, Toyoake, JP;
Iwao Ohwada, Nagoya, JP;
Yuki Bessho, Nishikasugai-Gun, JP;
Takayoshi Akao, Nagoya, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.