The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2009

Filed:

Feb. 06, 2007
Applicants:

Hideyuki Arai, Toyama, JP;

Takashi Nakabayashi, Toyama, JP;

Yasutoshi Okuno, Kyoto, JP;

Inventors:

Hideyuki Arai, Toyama, JP;

Takashi Nakabayashi, Toyama, JP;

Yasutoshi Okuno, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 21/8236 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

After protective insulating films are formed on first to third active regions, the protective insulating films formed on the first and third active regions are removed. Subsequently, an insulating film to be a first gate insulating film is formed on each of the first and third active regions, and then, the protective insulating film formed on the second active region is removed. Next, an insulating film to be a second gate insulating film is formed on the second active region, and then, the insulating film to be the first gate insulating film formed on the third active region is removed. Finally, an insulating film to be a third gate insulating film is formed on the third active region.


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