The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
May. 25, 2007
Morimasa Miyazaki, Saga, JP;
Morimasa Miyazaki, Saga, JP;
Sumco Corporation, Tokyo, JP;
Abstract
Methods for evaluating a quality of a semiconductor substrate. In one aspect, etching a surface of the semiconductor substrate by dry-etching, detecting bright points on the surface of the etched surface with a foreign matter inspection device, and evaluating the quality of the semiconductor substrate based on the number and/or distribution pattern of the detected bright points are included. In another aspect, etching a surface of the semiconductor substrate by dry-etching, detecting bright points on the surface of the etched surface with a foreign matter inspection device, and evaluating the quality of the semiconductor substrate are included, and the evaluated quality is a type of metal contaminant contained in the substrate, and the type of metal contaminant is identified by conducting elemental analysis of the detected bright points.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile