The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Aug. 25, 2006
Applicants:
Satoru Miyazawa, Kawagoe, JP;
Satoru Kobayashi, Kawagoe, JP;
Kazuhiko Maeda, Chiyoda-ku, JP;
Inventors:
Assignee:
Central Glass Company, Limited, Ube-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/09 (2006.01); C08G 63/137 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a novel polyester compound having in its main polymer chain an aliphatic cyclic structure with carboxylic acids or carboxylic acid ester groups as represented by the chemical formula (1), a resist material containing the polyester compound and a patterning method using the resist material.