The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Jul. 25, 2007
Nital S. Patel, Mesa, AZ (US);
Amit M. Rajadhyaksha, McKinney, TX (US);
James Boone, Richardson, TX (US);
Nital S. Patel, Mesa, AZ (US);
Amit M. Rajadhyaksha, McKinney, TX (US);
James Boone, Richardson, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The present invention facilitates multi-zone furnace () based deposition processes by iteratively adjusting deposition time and zonal setpoint temperatures to mitigate deviations from desired target thickness(es). Coupled feedback loops are employed to update the deposition time () and the zonal setpoint temperatures () lot to lot and batch to batch while mitigating deviations fro the desired target thickness(es). Error checking is performed by computing an error metric () and only updating the setpoint temperatures on the error metric being within an acceptable value (). Additionally, an excitation parameter () is determined that indicates variations in furnace operation.