The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
May. 23, 2006
Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor
Tuomo Lehtonen, Vantaa, FI;
Risto Mourujärvi, Perttula, FI;
Teemu Salo, Klaukkala, FI;
Jens Thurau, Selzen, DE;
Tuomo Lehtonen, Vantaa, FI;
Risto Mourujärvi, Perttula, FI;
Teemu Salo, Klaukkala, FI;
Jens Thurau, Selzen, DE;
VTI Technologies Oy, Vantaa, FI;
Abstract
The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.