The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Apr. 06, 2006
Kei Sato, Miyagi-ken, JP;
Takashi Horiuchi, Kumagaya, JP;
Kei Sato, Miyagi-ken, JP;
Takashi Horiuchi, Kumagaya, JP;
Zao Nikon Co., Ltd., Katta-Gun, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A substrate carrying apparatus, comprises: a first carrying mechanism that carries a substrate into an exposure processing unit that performs exposure processing via a projection optical system and a liquid; a second carrying mechanism that carries a substrate from the exposure processing unit; and an anti-scattering mechanism that controls scattering of the liquid from at least one of the second carrying mechanism and the substrate carried by the second carrying mechanism to at least one of the first carrying mechanism and the substrate carried by the first carrying mechanism.