The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Sep. 13, 2006
Applicant:
Joshua Brian Pankratz, Fort Collins, CO (US);
Inventor:
Joshua Brian Pankratz, Fort Collins, CO (US);
Assignee:
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/08 (2006.01); H01H 9/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system and method for managing power delivered to a processing chamber is described. In one embodiment power is delivered to the processing chamber with a power cable, the power cable storing energy and including a first and second conductors, the first conductor having a first voltage polarity relative to the second conductor. The voltage polarity of the first conductor is reversed relative to the second conductor and at least a portion of the stored energy in the power cable is provided to the plasma chamber while the polarity of the first power cable is reversed.