The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2009

Filed:

May. 26, 2006
Applicants:

Takatoshi Ashizawa, Yokohama, JP;

Mine Sumitomo, Chuo-ku, JP;

Mina Kobayashi, Kawasaki, JP;

Inventors:

Takatoshi Ashizawa, Yokohama, JP;

Mine Sumitomo, Chuo-ku, JP;

Mina Kobayashi, Kawasaki, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vibrational actuator includes an oscillator that generates vibrational energy; a mover that is rotationally driven around a first axis by the vibrational energy; an output shaft that rotates around a second axis by using a rotational force communicated from the mover; and a flange portion projecting out from the output shaft along a direction intersecting the second axis, that rotates together with the output shaft. Pressure is applied to the mover at a position between the flange portion and the oscillator. A distance from the first axis to an outer portion of the mover over an area where the mover is pressed against the flange portion is set to a value large enough to prevent the first axis and the second axis from becoming tilted relative to each other.


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