The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Apr. 11, 2005
Applicants:
Sarabjit Mehta, Calabasas, CA (US);
David E. Grider, Charlotte, NC (US);
Wah S. Wong, Montebello, CA (US);
Inventors:
Sarabjit Mehta, Calabasas, CA (US);
David E. Grider, Charlotte, NC (US);
Wah S. Wong, Montebello, CA (US);
Assignee:
HRL Laboratories, LLC, Malibu, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for fabricating a combined micro electromechanical/gallium nitride structure. The micro electromechanical structure comprises a piezoelectric device, such as a piezoelectric switch or a bulk acoustic wave device. According to the process, high Q compact bulk acoustic wave resonators can be built. The process is applicable to technologies such as tunable planar filter technology, amplifier technology and high speed analog-to-digital converters.