The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Feb. 01, 2007
Noriko Tomita, Miyagi, JP;
Takashi Ohsako, Miyagi, JP;
Noriko Tomita, Miyagi, JP;
Takashi Ohsako, Miyagi, JP;
Oki Semiconductor Co., Ltd., Tokyo, JP;
Abstract
A semiconductor substrate surface protection method for maintaining surfaces thereof clean includes providing a tank containing pure water and a chemical protection material which is a high molecular straight-chain organic compound; and immersing the semiconductor substrate in the tank to deposit the high molecular straight-chain organic compound on the semiconductor substrate for maintaining the surfaces thereof clean. This convenient method prevents deposition of contaminating substances directly onto the semiconductor substrate and enables maintaining of this contaminant-free surface at a low cost.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile