The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2009

Filed:

Mar. 06, 2006
Applicants:

Robert E. Jones, Austin, TX (US);

Ajay Somani, Cambridge, MA (US);

Inventors:

Robert E. Jones, Austin, TX (US);

Ajay Somani, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for making a composite integrated device includes providing a first integrated device having a substrate, an overlying interconnect region, and a contact, wherein the contact electrically contacts the interconnect region and is at a surface of the first integrated device. The method further includes forming a sidewall spacer along a sidewall of a first opening in a first dielectric layer, located over the surface of the integrated device, and providing a deformable metal feature adjacent to the sidewall spacer and in the first opening. The method further includes providing a second integrated device having a substrate, an overlying interconnect region, a contact, and a second dielectric layer surrounding the contact of the second integrated device. The method further includes contacting the contact of the second integrated device with the deformable metal feature and pressing the first dielectric layer against the second dielectric layer.


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