The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Sep. 04, 2003
Yukinori Ochiai, Tokyo, JP;
Masahiko Ishida, Tokyo, JP;
Junichi Fujita, Tokyo, JP;
Takashi Ogura, Tokyo, JP;
Junji Momoda, Yamaguchi, JP;
Eiji Oshima, Fukuoka, JP;
Yukinori Ochiai, Tokyo, JP;
Masahiko Ishida, Tokyo, JP;
Junichi Fujita, Tokyo, JP;
Takashi Ogura, Tokyo, JP;
Junji Momoda, Yamaguchi, JP;
Eiji Oshima, Fukuoka, JP;
NEC Corporation, Tokyo, JP;
Tokuyama Corporation, Shunan-shi, JP;
Abstract
The resist according to the present invention includes any one of tetrachloromethyl tetramethoxycalix [4] arene and trichloromethyl tetramethoxycalix [4] arene. The resist including such kind of components is soluble in the solvent having less effect to worsen a working environment, namely, ethyl lactate (EL), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), ethyl propionate, n-butyl acetate and 2-heptanone. It can be developed by tetra-methyl ammonium hydroxide in addition to the above mentioned solvent. By exposing this resist by electronic ray, high resolution of 8 nm is attained, and by using this resist as a mask, various materials can be formed into a hyperfine shape. According to such kind of resist, a photosensitive resist material which has high resolution and solvable to solvents having less effect to worsen the working environment and can be developed by the solvents, a exposure method using it, and a hyperfine processing method using it are provided.