The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2009

Filed:

Aug. 17, 2004
Applicants:

Sambasivan Sankar, Chicago, IL (US);

Amit Goyal, Knoxville, TN (US);

Scott A. Barnett, Evanston, IL (US);

Ilwon Kim, Skokie, IL (US);

Donald M. Kroeger, Knoxville, TN (US);

Inventors:

Sambasivan Sankar, Chicago, IL (US);

Amit Goyal, Knoxville, TN (US);

Scott A. Barnett, Evanston, IL (US);

Ilwon Kim, Skokie, IL (US);

Donald M. Kroeger, Knoxville, TN (US);

Assignees:

Applied Thin Films, Inc., Evanston, IL (US);

UT-Battelle, LLC, Oak Ridge, TN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 39/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metals and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layer. In some embodiments the article further comprises electromagnetic devices which may have superconducting properties.


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