The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2009
Filed:
Dec. 09, 2003
Applicants:
Zhiyun Chen, Alexandria, VA (US);
Erin F. Fleet, Springfield, VA (US);
Serpil Gönen, College Park, MD (US);
Gregory D. Cooper, Vienna, VA (US);
Inventors:
Zhiyun Chen, Alexandria, VA (US);
Erin F. Fleet, Springfield, VA (US);
Serpil Gönen, College Park, MD (US);
Gregory D. Cooper, Vienna, VA (US);
Assignee:
Pixelligent Technologies LLC, College Park, MD (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 5/56 (2006.01);
U.S. Cl.
CPC ...
Abstract
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.