The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2009

Filed:

Sep. 07, 2005
Applicant:

Xinbing Liu, Cambridge, MA (US);

Inventor:

Xinbing Liu, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vibration machining apparatus and method of use. The vibration machining apparatus includes a cutting tool and a motion stage coupled to one of the cutting tool or the workpiece to move the cutting tool relative to the workpiece. A tangent to a machine path and a normal to the surface of the workpiece define a vibration plane. The vibration machining apparatus further includes a first vibrating unit coupled to one of the cutting tool or the workpiece to vibrate it along a first vibrational direction, substantially in the vibration plane, and a second vibrating unit coupled with one of the cutting tool or the workpiece to vibrate the one of the cutting tool or the workpiece coupled to the second vibrating unit along a second vibrational direction, different from the first direction and substantially in the vibration plane.


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