Biaxial actuators with comb electrodes having separated vertical positions

Abstract

Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.