The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Mar. 28, 2005
Motohiro Yasui, Nagoya, JP;
Jun Akedo, Tsukuba, JP;
Motohiro Yasui, Nagoya, JP;
Jun Akedo, Tsukuba, JP;
Brother Kogyo Kabushiki Kaisha, Nagoya, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Abstract
The present invention provides a simple method using aerosol deposition, for manufacturing a piezoelectric film that will simultaneously satisfy various characteristics required of a piezoelectric film. In the method, the piezoelectric film is formed on a substrate by ejecting an aerosol containing particles of a piezoelectric material onto the substrate so that the particles adhere thereto, and a second piezoelectric layer is formed on the first piezoelectric layer by conducting the ejection such that energy used for crushing the particles when the particles collide with the substrate is less than in the formation of the first piezoelectric film.