The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Sep. 08, 2005
Young-ho Park, Gyeonggi-do, KR;
Si-yeong Gwag, Gyeonggi-do, KR;
Yoo-keun Won, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A system of controlling a wavelength of a laser beam is provided. The system comprises a stage for supporting a wafer, an optical convergence unit for emitting the laser beam moving in an optical path toward the stage, and a specific wavelength detecting sensor. The specific wavelength detecting sensor is disposed between the optical convergence unit and the stage. It includes a laser beam absorbing structural body for absorbing a specific wavelength of the laser beam emitting toward the stage. A wavelength controlling unit for selectively controlling the wavelength of the laser beam is also provided.