The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Nov. 13, 2007
Lionel Paratte, Neuchâtel, CH;
Wilfried Noell, Neuchâtel, CH;
Jean-philippe Rebeaud, Cressier, CH;
Nicolas Golay, Neuchâtel, CH;
Yves Petremand, Yverdon-les-Bains, CH;
André Zanetta, Neuchâtel, CH;
Fabien Blondeau, Le Landeron, CH;
Pierre-andré Meister, Bienne, CH;
Lionel Paratte, Neuchâtel, CH;
Wilfried Noell, Neuchâtel, CH;
Jean-Philippe Rebeaud, Cressier, CH;
Nicolas Golay, Neuchâtel, CH;
Yves Petremand, Yverdon-les-Bains, CH;
André Zanetta, Neuchâtel, CH;
Fabien Blondeau, Le Landeron, CH;
Pierre-André Meister, Bienne, CH;
ETA SA Manufacture Horlogére Suisse, Grenchen, CH;
Abstract
The invention proposes a MEMS micromotor produced in a plate made of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer forming a substrate, and an upper layer in which at least one actuator and a rotor is etched, the actuator driving the rotor in rotation about a shaft (), characterized in that the shaft () is connected to the plate, in that the shaft () extends axially through a hole of the plate, and in that the shaft () is clamped in the hole and centered in the hole by means of elastic fixing structures which are produced by etching in the substrate and which are arranged on the circumference of the hole.