The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Aug. 22, 2006
Gal Amar, Peer Tuvia, IL;
Avishay Guetta, Rehovot, IL;
Doron Shoham, Rehovot, IL;
Gilad Schwartz, Meishar, IL;
Ronen Eynat, Shoham, IL;
Gal Amar, Peer Tuvia, IL;
Avishay Guetta, Rehovot, IL;
Doron Shoham, Rehovot, IL;
Gilad Schwartz, Meishar, IL;
Ronen Eynat, Shoham, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.