The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Jun. 20, 2005
Applicant:
Akio Kawabata, Kawasaki, JP;
Inventor:
Akio Kawabata, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
D01F 9/127 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing carbon nanotubes that is capable of growing carbon nanotubes on a substrate by a CVD method without giving rise to residual carbon impurities is provided. The method of manufacturing carbon nanotubes according to the present invention is a method in which carbon nanotubes are grown on a substrate by a chemical vapor deposition (CVD) process using a reaction gas containing a compound for the carbon source, wherein a compound having a carbon skeleton and a functional group which is effective for removing carbon impurities that deposit during the growth of carbon nanotubes is used as the compound for the carbon source.