The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2009

Filed:

Jun. 19, 2007
Applicants:

Alex Horng, Kaohsiung, TW;

I-yu Huang, Kaohsiung, TW;

Yen-chi Lee, Kaohsiung, TW;

Inventors:

Alex Horng, Kaohsiung, TW;

I-Yu Huang, Kaohsiung, TW;

Yen-Chi Lee, Kaohsiung, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Provided is a new design and fabrication of scratch drive actuator (SDA) micro rotary motor with low driving voltage and high lifetime characteristics. To substantially reduce the driving voltage from 30˜150 Vto 12˜30 Vac amplitude, a silicon wafer with very low resistivity (<0.004 Ω-cm) was firstly adopted as the substrate of SDA micro motor. Furthermore, a novel SDA structure and geometric design for the improvement of lifetime (>75 hrs) and rotational speed (˜30 rpm) of SDA micro motor was also demonstrated in this patent.


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