The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Oct. 24, 2005
Armin Schmidt, Zeulenroda, DE;
Gerald Janicke, Bobbau, DE;
Roland Weidl, Bollberg, DE;
Hendryk Richert, Jena, DE;
Bernd E. Gruenler, Zeulenroda, DE;
Hans-jurgen Tiller, Jena, DE;
Uwe Kriltz, Jena, DE;
Armin Schmidt, Zeulenroda, DE;
Gerald Janicke, Bobbau, DE;
Roland Weidl, Bollberg, DE;
Hendryk Richert, Jena, DE;
Bernd E. Gruenler, Zeulenroda, DE;
Hans-Jurgen Tiller, Jena, DE;
Uwe Kriltz, Jena, DE;
Guardian Industries Corp., Auburn Hills, MI (US);
Abstract
A sputtering target comprising an outer target tube, an inner support tube supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments attached to an outer surface of the inner support tube.