The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Apr. 27, 2005
Kazuhiko Itaya, Tokyo, JP;
Takashi Kawakubo, Tokyo, JP;
Kenya Sano, Tokyo, JP;
Ryoichi Ohara, Tokyo, JP;
Kazuhiko Itaya, Tokyo, JP;
Takashi Kawakubo, Tokyo, JP;
Kenya Sano, Tokyo, JP;
Ryoichi Ohara, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A thin film piezoelectric resonator includes a substrate having a cavity, and a resonance portion located on the substrate and right above the cavity. The resonance portion includes a lower electrode layer located at a side of the cavity, an upper electrode layer opposite to the lower electrode layer, and a piezoelectric thin film located between the upper electrode layer and the lower electrode layer. A side of the piezoelectric thin film and a side of the lower electrode layer are located in a common plane.