The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Dec. 20, 2004
David Malcolm Camm, Vancouver, CA;
Mladen Bumbulovic, Vancouver, CA;
Joseph Cibere, Burnaby, CA;
J. Kiefer Elliott, Vancouver, CA;
Steve Mccoy, Burnaby, CA;
Greg Stuart, Burnaby, CA;
David Malcolm Camm, Vancouver, CA;
Mladen Bumbulovic, Vancouver, CA;
Joseph Cibere, Burnaby, CA;
J. Kiefer Elliott, Vancouver, CA;
Steve McCoy, Burnaby, CA;
Greg Stuart, Burnaby, CA;
Mattson Technology Canada, Inc., Vancouver, CA;
Abstract
Apparatuses and methods for suppressing thermally induced motion of a workpiece. An apparatus includes a workpiece heating system configured to thermally induce motion of a workpiece, and further includes a damping member spaced apart from the workpiece and configured to apply a damping force to dampen the motion of the workpiece. The damping member may be spaced apart from a rest position of the workpiece by a distance sufficiently small that gas pressure between the damping member and the workpiece opposes the motion of the workpiece. The distance is preferably adjustable.