The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Jun. 07, 2006
Ryoichi Ohara, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Takashi Kawakubo, Yokohama, JP;
Ryoichi Ohara, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Takashi Kawakubo, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A piezoelectric thin film resonator includes a substrate in which a cavity is formed, a first electrode having a first electrode edge and partly spanning the cavity on the substrate; a piezoelectric layer placed on the first electrode, a second electrode having a second electrode edge and placed on the piezoelectric layer, a resonator unit constituted by an overlapping part of the first electrode, the piezoelectric layer, the second electrode, and the cavity; and a second lead wiring which is integral with the second electrode, extends to the substrate where the cavity is not present, and has a width larger than a part of a peripheral length of the cavity to which the second electrode edge extends. In the piezoelectric thin film resonator, a first length defined by the periphery of the first electrode of the resonator unit is larger than a second length defined by the second electrode edge of the resonator unit.