The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7498651 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 03, 2009

Filed:

Nov. 23, 2005
Applicant:

Bart Van Zeghbroeck, Boulder, CO (US);

Inventor:

Bart Van Zeghbroeck, Boulder, CO (US);

Assignee:

Microsemi Corporation, Bend, OR (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/93 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed are a variety of junction termination structures for high voltage semiconductor power devices. The structures are specifically aimed at providing a high breakdown voltage while being constructed with a minimal number of process steps. The combination of an RIE etch and/or implantation and anneal process with a finely patterned mesh provides the desired radial gradient for maximum breakdown voltage. The structures provide control of both the conductivity and charge density within the region. These structures can beneficially be applied to all high voltage semiconductor device structures, but are of particular interest for wide bandgap devices as they tend to have very high breakdown fields and scaled dimensions of the depletion layer width.


Find Patent Forward Citations

Van Zeghbroeck, Bart. (2009). Junction termination structures for wide-bandgap power devices (U.S. Patent No. 7498651). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7498651

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