The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Dec. 28, 2004
Applicant:
Tae-hang Ahn, Yeoksam-dong, KR;
Inventor:
Tae-Hang Ahn, Yeoksam-dong, KR;
Assignee:
Hynix Semiconductor Inc., Icheon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device with a low contact resistance and a method for fabricating it are described. The semiconductor device includes a substrate structure with a contact hole and a contact plug formed on the contact hole. The contact plug is provided with an epitaxial silicon layer and a metal layer formed on the epitaxial silicon layer. The method for fabricating such semiconductor device includes steps of exposing a portion of a substrate structure to form a contact hole, then forming an epitaxial silicon layer and a metal layer.