The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Sep. 15, 2004
Laurence P. Sadwick, Salt Lake City, UT (US);
Jehn-huar Chern, Salt Lake City, UT (US);
Ruey-jen Hwu, Salt Lake City, UT (US);
Laurence P. Sadwick, Salt Lake City, UT (US);
Jehn-Huar Chern, Salt Lake City, UT (US);
Ruey-Jen Hwu, Salt Lake City, UT (US);
Innosys, Inc., Salt Lake City, UT (US);
Abstract
Vacuum compatible high frequency electromagnetic and millimeter wave source components, devices and methods of micro-fabricating such components and devices are disclosed. Embodiments of the methods may include using a UV-curable photoresist, such as SU-8 to form structures having height up to and exceeding 1 mm. High frequency electromagnetic wave sources including the inventive high frequency electromagnetic wave source components are also disclosed.