The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Nov. 23, 2005
Jae-woo Chung, Seoul, KR;
Jun Jung, Yongin-si, KR;
Jae-Woo Chung, Seoul, KR;
Jun Jung, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A method for controlling a batch-type semiconductor processing apparatus is provided. The method checks whether a recipe set based on basic process information is within a recipe group stored in the semiconductor processing apparatus. The method also checks whether the quantity of wafers read through lot mapping is correlated to the quantity of wafers indicated by the basic process information. During the semiconductor fabrication process, the method also checks whether a current recipe of the semiconductor processing apparatus is correlated to the set recipe.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile