The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Feb. 01, 2007
Yoshitaka Kubo, Yamanashi, JP;
Toshiyasu Shiomi, Yamanashi, JP;
Akira Egawa, Gotenba, JP;
Kazuhiro Suzuki, Yamanashi, JP;
Yoshitaka Kubo, Yamanashi, JP;
Toshiyasu Shiomi, Yamanashi, JP;
Akira Egawa, Gotenba, JP;
Kazuhiro Suzuki, Yamanashi, JP;
Fanuc Ltd, Minamitsuru-gun, Yamanashi, JP;
Abstract
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.